Spin Module - [데모 테스트 문의]

SM-150 (BT & BM), SM-200 (Cabinet & BM), SM-300 (Cabinet & BM), SM-600, SM-900

UV LED Exposure System for Photolithography

UV-EXP150R, 150S, 200S, 300S, 600S

Microwave PR Ashing, Stripping, Decapsulation Tool

Microwave Decapsulation, Stripping - Tool/ SU-8 Remover

Laminators

＜VXL-1200X＞ / ＜EXL2-1200X＞ / ＜DXL2-800X＞ / ＜CPL-300CS＞ / Semi-automatic tool; SXL model available

Wafer Chucks

Wet Process Wafer Chucks, Electrostatic Chucks, Multiple Chip Vacuum Chuck

Remote Plasma System - [데모 테스트 문의]

Radical plasma source (Refelction 0.1%미만) 29kg Compact design

Hot Plate - [데모 테스트 문의]

HP-150(BT & BM), HP-200(BT, BM & Cabinet), HP-300(BT, BM & Cabinet), HP-300-Z, HP-600

HF Vapor Phase Etcher

VPE 100/150/200

Magnetron Head / 마이크로파 발생장치 - [데모 테스트 문의]

Generator 915, 2450, 5800 Mhz Isolator 내장형

Spin Module Developer / Etcher

SMD-200(Cabinet & BM), SMD-300(Cabinet & BM), SMD-200-E(Cabinet & BM), SMD-300-E(Cabinet & BM), SMD-600

Spray Coater

iSPRAY-300 Cabinet

Spin Rinse Dryer

SRD-50-100, SRD 150, SRD 150-4S

Combined Duo System / Perfect Couple

SM-150/HP-150, SM-200/HP-200, SMD-200/HP-200

ROBO module / Flexible Automation

Combi SM/HP, Combi ispray/HP, Combi SMD/HP

Cluster System / Modular System

Sirius, Pioneer, Explorer, Orbiter

Dosing Pump, Valve, Controller

Dosing Pump, Supply Pump, Dosing Valve, Controller

Shadow Mask Aligner

SMA / Double Image Microscope

Infrared Microscope

IRM 200

Chip to Chip Bonder

CCB

Wafer Bonding Inspection Device

WBI 100/150/200

Magnetrons - [데모 테스트 문의]

Magnetron 915-5800[Mhz] 1kW~100kW

Power Supply - [데모 테스트 문의]

SMPS 1kW~100kW, Solid States ~2kW

3-Stub Tuner

WR284, 340, 975 / 1kW~100kW

Auto Tuner

WR284, 340, 975 / 1kW~100kW

Islolator

Circulator

WR 284, 340, 975 1kW~100kW

Coupler

Detector Diode

Adjustable Shorts

Bends