3-Stub Tuner

WR284, 340, 975 / 1kW~100kW

Adjustable Shorts

Attenuator

Auto Tuner

WR284, 340, 975 / 1kW~100kW

Bends

Chip to Chip Bonder

CCB

Circulator

WR 284, 340, 975 1kW~100kW

Cluster System / Modular System

Sirius, Pioneer, Explorer, Orbiter

Combined Duo System / Perfect Couple

SM-150/HP-150, SM-200/HP-200, SMD-200/HP-200

Coupler

Detector Diode

Dosing Pump, Valve, Controller

Dosing Pump, Supply Pump, Dosing Valve, Controller

HF Vapor Phase Etcher

VPE 100/150/200

Hot Plate - [데모 테스트 문의]

HP-150(BT & BM), HP-200(BT, BM & Cabinet), HP-300(BT, BM & Cabinet), HP-300-Z, HP-600

Infrared Microscope

IRM 200

Islolator

Magnetron Head / 마이크로파 발생장치 - [데모 테스트 문의]

Generator 915, 2450, 5800 Mhz Isolator 내장형

Magnetrons - [데모 테스트 문의]

Magnetron 915-5800[Mhz] 1kW~100kW

Mcirowave Measurements-Analyzing Components

Mcirowave Measurements-Leakage Meters

Microwave Power Splitter

Microwave PR Ashing, Stripping, Decapsulation Tool

Microwave Decapsulation, Stripping - Tool/ SU-8 Remover

Power Supply - [데모 테스트 문의]

SMPS 1kW~100kW, Solid States ~2kW

R&D MOCVD

Agilis Mini / Agilis 100, 500, 700 / A Series / GOX Series 300 / Custom Systems

Remote Plasma System - [데모 테스트 문의]

Radical plasma source (Refelction 0.1%미만) 29kg Compact design

ROBO module / Flexible Automation

Combi SM/HP, Combi ispray/HP, Combi SMD/HP

Shadow Mask Aligner

SMA / Double Image Microscope

Spin Module - [데모 테스트 문의]

SM-150 (BT & BM), SM-200 (Cabinet & BM), SM-300 (Cabinet & BM), SM-600, SM-900

Spin Module Developer / Etcher

SMD-200(Cabinet & BM), SMD-300(Cabinet & BM), SMD-200-E(Cabinet & BM), SMD-300-E(Cabinet & BM), SMD-600

Spin Rinse Dryer

SRD-50-100, SRD 150, SRD 150-4S