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SEMICONDUCTOR DIVISION

mr-NIL 6000E 요약정보 및 구매

Photochemically Curing Resist for Thermal Nanoimprint Lithography series

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제조사 MicroResist Technology
원산지 Germany
브랜드 mr-NIL 6000E series
모델 mr-NIL 6000.1E~6000.3E

제품 기본설명

Photochemically Curing Resist for Thermal Nanoimprint Lithography series

제품 상세설명

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▣ Excellent film quality 

▣ Tg 40°C (before curing)  
▣ Imprinting, UV flood exposure, annealing and mould release i at the same temperature 
▣ Smallest feature size at least 50 nm(depending on mould resolution) 
▣ Very low residual layer thickness < 10 nm 
▣ Excellent pattern transfer fidelity 

▣ Plasma etch resistance comparable to conventional novolak-based photoresists
 

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