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SU-8 2000 Negative Photoresist
SU-8 2000.2~2100 -
Microwave Decapsulation, Stripping Tool (샘플 테스트 문의)
Microwave Decapsulation, Stripping - Tool/ SU-8 Remover -
SU-8 3000 Negative Photoresist
SU-8 3005~3050 -
InAs
2", 3" diameter -
KMPR 1000
KMPR 1005~1035 -
UV LED 노광 시스템(UV LED Exposure System for Photolithography) (테스트 문의)
UV-EXP150R, 150S, 200S, 300S, 600S -
Si wafer / SiO₂ oxide wafer
3 - 12 -
스핀코터 (Spin Module) (데모 테스트 문의)
SM-150(BT & BM), SM-200(Cabinet & BM), SM-300(Cabinet & BM), SM-600, SM-900 -
PermiNex 1000, 2000
PermiNex 1001~1015, 2001~2015 -
LOR & PMGI
LOR A~C / PMGI SF, SF Slow -
NANO PMMA & Copolymer
495 A, 495C, 950 A, 950 C / MMA 8.5 MMA EL -
PriElex Jettable Polymeric Materials
XP PriElex® SU-8 -
ma-N 400, 1400
ma-N 405~490, 1405~1440 -
ma-N 2400
ma-N 2401~2410 -
mr-EBL 6000
ma-EBL 6000.1~6000.5 -
mr-UVL 6000
mr-UVL 6000.1~6000.5 -
mr-DWL
mr-DWL 5 , mr-DWL 40 , mr-DWL 100 -
ma-P 1200
ma-P 1205~1275 / 1275HV -
ma-P 1275G
ma-P 1275G -
mr-P 1200 LIL
mr-P 1201 LIL, mr-P 1202 LIL -
Ormocomp
Ormocomp -
InkOrmo
InkOrmo -
Ormoclear
OrmoClear, OrmoClear 10, OrmoClear 30, OrmoClear FX -
Ormostamp
Ormostamp -
Ormocore & Ormoclad
Ormocore & Ormoclad -
mr-I 9000M
mr-I 9010M~9100M -
mr-I 7000R & 8000R
mr-I 7010R~7030R, 8010R~8030R -
mr-I 7000E & 8000E
mr-I 7010E~7030E, 8010E~8030E -
SIPOL
SIPOL-100nm , SIPOL-200nm -
mr-I T85
mr-I T85-0.3~5.0 -
mr-I PMMA
mr-I PMMA 35k 100~500 -
mr-NIL 6000E
mr-NIL 6000.1E~6000.3E -
mr-NIL 200
mr-NIL 200(100nm, 200nm, 300nm) -
mr-NIL 210
mr-NIL 210(100nm, 200nm, 500nm) -
mr-XNIL26SF
mr-XNIL26SF -
mr-UVCur26SF
mr-UVCur26SF -
Epocore & Epoclad
Epocore_2~_50 / Epoclad_2~_50 -
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Surpass 3000, 4000
Surpass 3000, 4000 -
DisCHARGE
H2O, IPA -
Remote Plasma System (데모테스트 문의)
Radical plasma source (Refelction 0.1%미만) 29kg Compact design -
마그네트론 헤드(마이크로파 발생장치) (데모테스트 문의)
Generator 915, 2450, 5800 Mhz Isolator 내장형 -
마그네트론(Magnetrons)
magnetron 915-5800[Mhz] 1kW~100kW -
Power Supply(Touch screen간편 조종)
SMPS 1kW~100kW, Solid States ~2kW -
3-Stub Tuner
WR284, 340, 975 / 1kW~100kW -
Auto Tuner
WR284, 340, 975 / 1kW~100kW -
Circulator
WR 284, 340, 975 1kW~100kW -
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핫플레이트(Hot Plate) (데모 테스트 문의)
HP-150(BT & BM), HP-200(BT, BM & Cabinet), HP-300(BT, BM & Cabinet), HP-300-Z, HP-600 -
불산 기상 식각 장비(HF Vapor Phase Etcher)(데모테스트 문의)
VPE 100/150/200 -
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마스크 얼라이너(Shadow Mask Aligner)(데모테스트 문의)
SMA / Double Image Microscope -
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스핀드라이어(Spin Rinse Dryer)
SRD-50-100 -
웨이퍼 척(Wafer Chucks)
Wet Process Wafer Chucks, Electrostatic Chucks, Multiple Chip Vacuum Chuck -
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디벨로퍼(Developer) / 엣처(Etcher)
SMD-200(Cabinet & BM), SMD-300(Cabinet & BM), SMD-200-E(Cabinet & BM), SMD-300-E(Cabinet & BM), SMD-600 -
스프레이코터(Spray Coater)
iSPRAY-300 Cabinet -
로보 모듈(ROBO module)
Combi SM/HP, Combi ispray/HP, Combi SMD/HP -
컴바인드 시스템(Combined System)
SM-150/HP-150, SM-200/HP-200, SMD-200/HP-200 -
웨이퍼 본딩 검사 장비(Wafer Bonding Inspection Device)
WBI 100/150/200 -
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컴포넌트(Components)
Dosing Pump, Supply Pump, Dosing Valve, Controller -
적외선 마이크로스코프(Infrared Microscope)
IRM 200 -
클러스터 시스템(Cluster System)
Sirius, Pioneer, Explorer, Orbiter -
GaAs
2", 3" diameter -
GaAs
4", 5", 6" diameter -
GaSb
2", 3", 4" diameter -
GaSb
3" , 4" diameter -
InSb
2", 3", 4" diameter -
InSb
3" , 5" diameter -
InP
2" diameter -
AlN Wafer
AIN-10, AIN-20, AIN-30
