GaAs

2", 3" diameter

KMSF 1000 & 2000

KMSF 1005~30, 2005~2010

Spin Module - [데모 테스트 문의]

SM-150 (BT & BM), SM-200 (Cabinet & BM), SM-300 (Cabinet & BM), SM-600, SM-900

IQE epitaxial wafer

2-8" diameter

SU-8 3000CF DFR(Dry Fim Resist)

UV LED Exposure System for Photolithography

UV-EXP150R, 150S, 200S, 300S, 600S

InAs

2", 3" diameter

SU-8 TF 6000

SU-8 TF 6000.5~6010

Microwave PR Ashing, Stripping, Decapsulation Tool

Microwave Decapsulation, Stripping - Tool/ SU-8 Remover

GaSb

2", 3", 4" diameter

UniLOR N

UniLOR N 1.5~3.5

Laminators

＜VXL-1200X＞ / ＜EXL2-1200X＞ / ＜DXL2-800X＞ / ＜CPL-300CS＞ / Semi-automatic tool; SXL model available

InSb

2", 3", 4" diameter

PermiNex 1000 & 2000

PermiNex 1001~1015, 2001~2015

Wafer Chucks

Wet Process Wafer Chucks, Electrostatic Chucks, Multiple Chip Vacuum Chuck

AlN Wafer

AIN-10, AIN-20, AIN-30

ma-N 400 & 1400

ma-N 405~490, 1405~1440

Remote Plasma System - [데모 테스트 문의]

Radical plasma source (Refelction 0.1%미만) 29kg Compact design

InP

2" diameter

ma-N 2400

ma-N 2401~2410

Hot Plate - [데모 테스트 문의]

HP-150(BT & BM), HP-200(BT, BM & Cabinet), HP-300(BT, BM & Cabinet), HP-300-Z, HP-600

Si wafer / Glass wafer

Si / SiC / Glass / Sapphire / Quartz Wafer

ma-P 1200

ma-P 1205~1275 / 1275HV

HF Vapor Phase Etcher

VPE 100/150/200

GaAs

4-8" diameter

TempKoat P

TempKoat P 20

Magnetron Head / 마이크로파 발생장치 - [데모 테스트 문의]

Generator 915, 2450, 5800 Mhz Isolator 내장형

GaSb

3" , 4" diameter

InSb

3" , 5" diameter

KMPR 1000

KMPR 1005~1035

TempKoat N

TempKoat N 15

LOR/PMGI

LOR A~C/PMGI SF, SF Slow

NANO PMMA/Copolymer

495 A, 495C, 950 A, 950 C/MMA 8.5 MMA EL

SU-8 3000 Negative Photoresist

SU-8 3005~3050

SU-8 2000 Negative Photoresist

SU-8 2000.5~2100

SU-8

SU-8 2~100

Silver Conductive Ink

mr-EBL 6000

ma-EBL 6000.1~6000.5

mr-UVL 6000

mr-UVL 6000.1~6000.5

mr-DWL

mr-DWL 5 , mr-DWL 40 , mr-DWL 100

Epocore & Epoclad

Epocore_2~_50 / Epoclad_2~_50

ma-P 1200G

ma-P 1215~75G

mr-P 1200 LIL

mr-P 1201 LIL, mr-P 1202 LIL

Ormocomp

Ormocomp

InkOrmo

InkOrmo

Ormoclear

OrmoClear, OrmoClear 30, OrmoClear FX

Ormostamp

Ormostamp

Ormocore & Ormoclad

Ormocore & Ormoclad

mr-I 9000M

mr-I 9010M~9100M

mr-I 7000R & 8000R

mr-I 7010R~7030R, 8010R~8030R

mr-I 7000E & 8000E

mr-I 7010E~7030E, 8010E~8030E

SIPOL

SIPOL-100nm , SIPOL-200nm

mr-I T85

mr-I T85-0.3~5.0

mr-I PMMA35K

mr-I PMMA35k 100~500

mr-NIL 6000E

mr-NIL 6000.1E~6000.3E

mr-NIL 200

mr-NIL 200(100nm, 200nm, 300nm)

mr-NIL 210

mr-NIL 210(100nm, 200nm, 500nm)

mr-XNIL26SF

mr-XNIL26SF

mr-UVCur26SF

mr-UVCur26SF

Surpass 3000, 4000

Surpass 3000, 4000

DisCharge

DisCharge H2O

Spin Module Developer / Etcher

SMD-200(Cabinet & BM), SMD-300(Cabinet & BM), SMD-200-E(Cabinet & BM), SMD-300-E(Cabinet & BM), SMD-600

Spray Coater

iSPRAY-300 Cabinet

Spin Rinse Dryer

SRD-50-100, SRD 150, SRD 150-4S

Combined Duo System / Perfect Couple

SM-150/HP-150, SM-200/HP-200, SMD-200/HP-200

ROBO module / Flexible Automation

Combi SM/HP, Combi ispray/HP, Combi SMD/HP

Cluster System / Modular System

Sirius, Pioneer, Explorer, Orbiter

Dosing Pump, Valve, Controller

Dosing Pump, Supply Pump, Dosing Valve, Controller

Shadow Mask Aligner

SMA / Double Image Microscope

Infrared Microscope

IRM 200

Chip to Chip Bonder

CCB

Wafer Bonding Inspection Device

WBI 100/150/200

Magnetrons - [데모 테스트 문의]

Magnetron 915-5800[Mhz] 1kW~100kW

Power Supply - [데모 테스트 문의]

SMPS 1kW~100kW, Solid States ~2kW

3-Stub Tuner

WR284, 340, 975 / 1kW~100kW

Auto Tuner

WR284, 340, 975 / 1kW~100kW

Islolator

Circulator

WR 284, 340, 975 1kW~100kW

Coupler

Detector Diode

Adjustable Shorts

Bends

Attenuator

Microwave Power Splitter

Straight / default waveguide

Twist waveguide

Water Load / Dummy Load

Mcirowave Measurements-Analyzing Components

Mcirowave Measurements-Leakage Meters

Tape Remover

＜EXR2-1200X＞ / ＜DXR2-800X＞ / Semi-automatic tool; SXR model available

Wafer Tape Mounter

＜EXM-1200X＞ / ＜CXM-800/1200＞ / Semi-automatic tool; STM model available

UV Irradiation Equipment

＜EXR-800FMUV＞ / ＜EXR-1200FMUV＞ / Semi-automatic tool; TMS model available

R&D MOCVD

Agilis Mini / Agilis 100, 500, 700 / A Series / GOX Series 300 / Custom Systems