제품 상세설명
Thermoplastic Polymer for NIL
▷ Material Attributes
· Excellent film quality
· Plasma etch resistance superior to PMMA· Attainable smallest feature size at least 50 nm(depending on stamp resolution)
· Safe solvents
mr-I 7000E
low glass transition temperature (Tg = 60 °C) for nanoimprint lithography
mr-I 8000E
higher glass transition temperature (Tg = 115 °C) for nanoimprint lithography
관련제품
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