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SEMICONDUCTOR DIVISION

mr-I 7000R & 8000R 요약정보 및 구매

Thermoplastic Polymer for Nanoimprint Lithography with Improved Release Properties series

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제조사 MicroResist Technology
원산지 Germany
브랜드 mr-I 7000R & 8000R series
모델 mr-I 7010R~7030R, 8010R~8030R

제품 기본설명

Thermoplastic Polymer for Nanoimprint Lithography with Improved Release Properties series

제품 상세설명

 

▣ Excellent properties for thermal NIL - Short cycle times due to fast polymer flow, Sub-20 nm resolution, Low residual layer thickness, Low release forces

▣ Longer life-time of anti-sticking layers on the mould

▣ High plasma etch resistance comparable to    novolak-based photoresists
 

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