Spin Module - [데모 테스트 문의]

SM-150 (BT & BM), SM-200 (Cabinet & BM), SM-300 (Cabinet & BM), SM-600, SM-900

Hot Plate - [데모 테스트 문의]

HP-150(BT & BM), HP-200(BT, BM & Cabinet), HP-300(BT, BM & Cabinet), HP-300-Z, HP-600

HF Vapor Phase Etcher

VPE 100/150/200

Spin Module Developer / Etcher

SMD-200(Cabinet & BM), SMD-300(Cabinet & BM), SMD-200-E(Cabinet & BM), SMD-300-E(Cabinet & BM), SMD-600

Spray Coater

iSPRAY-300 Cabinet

Spin Rinse Dryer

SRD-50-100, SRD 150, SRD 150-4S

Combined Duo System / Perfect Couple

SM-150/HP-150, SM-200/HP-200, SMD-200/HP-200

ROBO module / Flexible Automation

Combi SM/HP, Combi ispray/HP, Combi SMD/HP

Cluster System / Modular System

Sirius, Pioneer, Explorer, Orbiter

Dosing Pump, Valve, Controller

Dosing Pump, Supply Pump, Dosing Valve, Controller

R&D MOCVD

Agilis Mini / Agilis 100, 500, 700 / A Series / GOX Series 300 / Custom Systems