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웨이퍼 척(Wafer Chucks)
Wet Process Wafer Chucks, Electrostatic Chucks, Multiple Chip Vacuum Chuck -
마스크 얼라이너(Shadow Mask Aligner) & 더블 이미지 마이크로스코프(Double Image Microscope)
SMA / Double Image Microscope -
웨이퍼 본딩 검사 장비(Wafer Bonding Inspection Device)
WBI 100/150/200 -
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UV LED 노광 시스템(UV LED Exposure System for Photolithography)
UV-EXP150R, 150S, 200S, 300S, 600S -
적외선 마이크로스코프(Infrared Microscope)
IRM 200
