product
SEMICONDUCTOR DIVISION

SIPOL 요약정보 및 구매

Si-containing thermal nanoimprint resist series for the fabrication of high aspect ratio patterns

제조사 MicroResist Technology
원산지 Germany
브랜드 SIPOL series
모델 SIPOL-100nm , SIPOL-200nm

제품 기본설명

Si-containing thermal nanoimprint resist series for the fabrication of high aspect ratio patterns

제품 상세설명

▣ Excellent flowability characteristics render short imprint cycle times and enable a fast filling of even large patterns with microscale dimensions

​ High oxygen plasma resistance due to a Si content of 10% 

​ Good mould release characteristics give rise to a low defectivity rate ​

관련제품

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