product
SEMICONDUCTOR DIVISION
Kayaku Advanced Materials,Inc.Micro Resist Technology GmbHNippon Kayaku Co., Ltd.DisChem, Inc.

KMPR 1000 요약정보 및 구매

제조사 KAYAKU ADVANCED MATERIALS (since MicroChem Corp.)
원산지 USA
브랜드 KMPR 1000 Series
모델 KMPR 1005~1035

제품 상세설명

Negative Epoxy Photoresists

▷ Material Attributes

· High aspect ratio with vertical sidewalls

· High chemical and plasma resistance

· Greater than 100 µm film thickness in a single coat

· Excellent adhesion to metals

· Wet strips in conventional strippers

· Excellent dry etch resistance

 

▷ Material Uses

· MEMS

· DRIE

· Electroplating

· Permanent Structures

관련제품

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