Negative Epoxy Photore​sists​

▷ Material Attributes​​

· High aspect ratio with vertical sidewalls

· High chemical and plasma resistance

· Greater than 100 µm film thickness in a single coat

· Excellent adhesion to metals

· Wet strips in conventional strippers

· Excellent dry etch resistance

▷ Material Uses​

· MEMS

· DRIE

· Electroplating

· Permanent Structures