제품 상세설명
Stripping Tool
Muegge사의 Stripping Tool은 SU-8 같은 두꺼운 PR혹은 Si 나 Si Conpounds를 식각하기 위한 용도로 제작되었습니다.
특징
- Si, SiO2, SiN, SiOxNy, W, Mo 등 비등방성 물질을 식각할때 사용할 수 있습니다.
- 460mm x 460mm 사이즈의 기판까지 식각 가능합니다.
- Ni, Ni/Fe, Au, Cu 등 금속물질은 식각으로부터 보호됩니다.
- 환경보호에 적합합니다.
Decapsulation tool
Muegge사의 Decapsulation Tool은 Microchips의 decapsulation 용도로 제작되었습니다.
특징
- Microwave주파수를 사용하여 decapsulation공정을 진행하며 일반적인 RF보다 세밀하고 그리고 안전하게 decapsulation 공정을 진행할 수 있습니다.
- inorganic filling 을 포함하여 식각 대상을 >0.2 mm/h 속도로 빠르고 효율적으로 깎아냅니다.
- RF에 비교해 메탈 제질의 Wire 본딩. 배선에 아주 적은 영향을 미칩니다,(Selectivity 500:1)
- 레이저 처리 후 decapsulation 공정시간은 1~3내외입니다.
- 빠른 등방성 에칭 방식으로 진행됩니다.
- Decapsulation 진행 후 샘플에 MW-radiation, ion, electrical fields가 남지 않습니다.
- 웨이퍼 사이즈 300mm까지 공정 가능합니다.
- Muegge 특허 RPS 장비를 사용하여 컴팩트하고 가벼운 사이즈로 제작되었습니다.
| Specifications: | |||
| INPUT VOLTAGE : | 400 V AC, 3 ph, 50 Hz, <3 x 16 A | EXTERNAL DIMENSIONS: | W = 800 mm, L = 800 mm, H = 800 mm |
| HF-POWER: | Max. 1 kW cw, 2450 MHz | DIMENSIONS PROCESS CHAMBER: | W = 500 mm, L = 500 mm. H =
400mm (e. g. 9 x 6" wafers) |
| COMPRESSED AIR: | Quality:
Oil-free, dry, 5 ìm filtered Pressure: 6 bar - 9 bar |
CONDITIONS: | Ambient-Temp.: 5 °C – 45 °C
noncondensing, T max. = 45 °C < 3 h/d, Humidity: 80 % @ 30 °C, subsequently linearly reduced to 50 % @ 45 °C |
| INPUT GASES; PROCESS PRESSURE |
Oxygen (O2),
Nitrogen (N2), Tetrafluoromethane (CF4); 0.4 mbar - 2.4 mbar |
COOLING: | Internally air-cooled and
water-cooled 4.5 bar - 6 bar, Water inlet temperature 20 °C - 25 °C |
| WORKING PLATE: | Temperature: 20 °C - 70 °C Heating/Cooling Fluid: Water | CONNECTIONS: | CEE-Connector plug 16 A
(MAINS), USB / COM / Ethernet (INTERFACE), ½“ lock coupling Rectus Series 87 (COOLING WATER), ¼“ torque clutch (COMPRESSED AIR), 6 mm Swagelok (INPUT GASES), KF 40 (OUTPUT TO VACUUM PUMP), Stud M6 (PE) |
| ASSEMBLY : | Fully enclosed
aluminum housing, Solid encapsulated assembly |
||
| Specifications: | |||
| INPUT VOLTAGE : | 400
V AC, 3 ph, 50 Hz, 3 x 45 A; (Recommended fuse: 50 A / NH00-gL/gG) |
EXTERNAL DIMENSIONS: | W = 980 mm, L = 930 mm, H = 2200 mm |
| HF-POWER: | Max. 3 kW cw, 2450 MHz | DIMENSIONS WORKING PLATE: | W = 320 mm, D = 320 mm |
| COMPRESSED AIR: | Quality:
Oil-free, dry, 5 ìm filtered Pressure: 6 bar - 9 bar |
CONDITIONS: | Ambient-Temp.: 5 °C – 45 °C
noncondensing, T max. = 45 °C < 3 h/d, Humidity: 80 % @ 30 °C, subsequently linearly reduced to 50 % @ 45 °C |
| INPUT GASES; PROCESS PRESSURE |
Oxygen (O2),
Nitrogen (N2), Tetrafluoromethane (CF4); 0.4 mbar - 2.4 mbar |
COOLING: | Internally air-cooled and
water-cooled 4.5 bar - 6 bar, Water inlet temperature 20 °C - 25 °C |
| WORKING PLATE: | Temperature: 20 °C - 200 °C Heating/Cooling Fluid: Oil | CONNECTIONS: | CEE-Connector plug 63 A (MAINS),
CEE-Connector-female (VACUUM PUMP), USB / COM / Ethernet (INTERFACE), ½“ lock coupling Rectus Series 87 (COOLING WATER), ¼“ torque clutch (COMPRESSED AIR), 6 mm Swagelok (INPUT GASES), ISO-K63 (OUTPUT TO VACUUM PUMP), Stud M6 (PE), |
| ASSEMBLY : | Fully enclosed
aluminum housing, Solid encapsulated assembly |
WEIGHT: | Approx. 480 kg |
| Specifications: | |||
| INPUT VOLTAGE : | 400 V AC, 3 ph, 50 Hz, <3 x 35 A | EXTERNAL DIMENSIONS: | W = 800 mm, L = 800 mm, H = 1950 mm |
| HF-POWER: | Max. 3 kW cw, 2450 MHz | DIMENSIONS PROCESS CHAMBER: | W = 500 mm, L = 500 mm. H =
400mm (e. g. 9 x 6" wafers) |
| COMPRESSED AIR: | Quality:
Oil-free, dry, 5 ìm filtered Pressure: 6 bar - 9 bar |
CONDITIONS: | Ambient-Temp.: 5 °C – 45 °C
noncondensing, T max. = 45 °C < 3 h/d, Humidity: 80 % @ 30 °C, subsequently linearly reduced to 50 % @ 45 °C |
| INPUT GASES; PROCESS PRESSURE |
Oxygen (O2),
Nitrogen (N2), Tetrafluoromethane (CF4); 0.4 mbar - 2.4 mbar |
COOLING: | Internally air-cooled and
water-cooled 4.5 bar - 6 bar, Water inlet temperature 20 °C - 25 °C |
| WORKING PLATE: | Temperature: 20 °C - 120 °C Heating/Cooling Fluid: Oil | CONNECTIONS: | CEE-Connector plug 63 A
(MAINS), CEE-Connector-female (VACUUM PUMP), USB / COM / Ethernet (INTERFACE), ½“ lock coupling Rectus Series 87 (COOLING WATER), ¼“ torque clutch (COMPRESSED AIR), 6 mm Swagelok (INPUT GASES), ISO-K63 (OUTPUT TO VACUUM PUMP), Stud M6 (PE) |
| ASSEMBLY : | Fully enclosed
aluminum housing, Solid encapsulated assembly |
WEIGHT: | Approx. 440 kg |
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