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Hot Plate - [데모 테스트 문의]
HP-150(BT & BM), HP-200(BT, BM & Cabinet), HP-300(BT, BM & Cabinet), HP-300-Z, HP-600 -
Spray Coater
iSPRAY-300 Cabinet -
Spin Module Developer / Etcher
SMD-200(Cabinet & BM), SMD-300(Cabinet & BM), SMD-200-E(Cabinet & BM), SMD-300-E(Cabinet & BM), SMD-600 -
Spin Rinse Dryer
SRD-50-100, SRD 150, SRD 150-4S -
Combined Duo System / Perfect Couple
SM-150/HP-150, SM-200/HP-200, SMD-200/HP-200 -
ROBO module / Flexible Automation
Combi SM/HP, Combi ispray/HP, Combi SMD/HP -
Cluster System / Modular System
Sirius, Pioneer, Explorer, Orbiter -
Dosing Pump, Valve, Controller
Dosing Pump, Supply Pump, Dosing Valve, Controller -
HF Vapor Phase Etcher
VPE 100/150/200 -
R&D MOCVD
Agilis Mini / Agilis 100, 500, 700 / A Series / GOX Series 300 / Custom Systems