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HF Vapor Phase Etcher
VPE 100/150/200 -
Shadow Mask Aligner
SMA / Double Image Microscope -
Infrared Microscope
IRM 200 -
Wafer Bonding Inspection Device
WBI 100/150/200 -
R&D MOCVD
Agilis Mini / Agilis 100, 500, 700 / A Series / GOX Series 300 / Custom Systems